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| Silicon Piezoresistive Relative Pressure Sensor KPY 51-RK KPY 57-RK Features Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability * High long term stability * Built in silicon temperature sensor * Provided for further fabrication, protection cap * * * * TO-8-6 Type and Marking KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Pin Configuration 1 2 3 4 5 6 7 8 Symbol Pressure Range 0 ... 0.25 0 ... 0.6 0 ... 1.6 0...4 0 ... 10 0 ... 25 0 ... 60 Unit bar Ordering Code Q62705-K189 Q62705-K190 Q62705-K191 Q62705-K193 Q62705-K195 Q62705-K197 Q62705-K199 P0 ... PN Capillary tube + VIN - VOUT Temperature sensor (typ. R25 = 2 k) Temperature sensor - VIN + VOUT Not connected Semiconductor Group 1 02.97 KPY 51-RK KPY 57-RK Absolute Maximum Ratings Parameter Pressure overload KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Operating temperature range Storage temperature range Supply voltage Symbol Limit Values1) Frontside Rearside Unit bar 2 6 10 16 30 75 100 2 6 10 16 30 40 70 - 40 ... + 125 - 50 ... + 150 12 C C V PMAX TA Tstg VIN 1) Frontside coupling applies pressure onto chip face. Rearside coupling applies pressure through Kovar centre tube. Electrical Characteristics at TA = 25 C and VIN = 5 V, unless otherwise specified. Parameter Bridge resistance Sensitivity KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Output voltage KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Symbol min. Limit Values typ. - 24.0 15.0 8.8 6.0 2.6 1.2 0.67 30 45 70 120 130 150 200 max. 8 32.0 24.0 12.5 9.0 4.0 2.0 1.0 40 72 100 180 200 250 300 k mV/ Vbar 4 16.8 11.0 5.6 4.0 1.8 0.88 0.47 Unit RB s Vfin 21 33 45 80 90 110 140 mV Semiconductor Group 2 KPY 51-RK KPY 57-RK Electrical Characteristics (cont'd) at TA = 25 C and VIN = 5 V, unless otherwise specified. Parameter Offset voltage P = P0 Linearity error (Best fit straight line) P0 = P0 ... PN KPY 51 ... 55 RK KPY 56/57 RK Pressure hysteresis PH P1 = P0, P2 = PN, P3 = P0 KPY 51 ... 57 RK Symbol min. Limit Values typ. - max. mV - 25 + 25 % Vfin - - - 0.15 0.35 0.15 - 0.1 - % Vfin Unit V0 FL Electrical Characteristics at T1 = 25 C, T2 = 125 C, T3 = 25 C and VIN = 5 V, unless otherwise specified. Parameter Temperature coefficient of Vfin KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Temperature coefficient of V0 KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Temperature coefficient of RB KPY 51 ... 57 RK Symbol min. Limit Values typ. - 0.13 - 0.15 - 0.16 - 0.17 - 0.17 - 0.17 - 0.17 - - - - - - - + 0.095 max. %/K - 0.19 - 0.19 - 0.19 - 0.19 - 0.19 - 0.19 - 0.19 - 0.09 - 0.12 - 0.13 - 0.14 - 0.14 - 0.15 - 0.15 %/K - 0.05 - 0.05 - 0.03 - 0.03 - 0.03 - 0.03 - 0.01 + 0.05 + 0.05 + 0.03 + 0.03 + 0.03 + 0.03 + 0.01 %/K - - Unit TCVfin TCV0 TCRB Semiconductor Group 3 KPY 51-RK KPY 57-RK Electrical Characteristics (cont'd) at T1 = 25 C, T2 = 125 C, T3 = 25 C and VIN = 5 V, unless otherwise specified. Parameter Temperature hysteresis of V0; Vfin KPY 51 RK KPY 52 RK KPY 53 ... 57 RK Package Outline TO-8-6 Symbol min. Limit Values typ. max. % v. Unit TH - 0.7 - 0.5 - 0.3 - - - + 0.7 + 0.5 + 0.3 Vfin Weight approx. 4.5 g Dimension in mm Exterior Packaging I.e. tubes, trays, boxes are shown in our Data Book "Package Information". Semiconductor Group 4 |
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